LITHOGRAFIEVERFAHREN UND LITHOGRAFIESYSTEM

European patent · EP3006902 · Deleted

Register entry

Publication number
EP3006902
Application number
EP15182014
Kind
European patent with effect for Switzerland and Liechtenstein
Status
Deleted
Specification
Granted
Filed
Feb 16, 2011
Published
Apr 13, 2016
Granted
Apr 11, 2018
Deleted
Feb 28, 2019
Reason
Annual fee unpaid
IPC classes
G01D 5/38 (2006.01)
G01D 5/26 (2006.01)
G02B 6/00 (2006.01)
H01L 21/027 (2006.01)
Priority
US 319252 P 30.03.2010
US 327983 P 26.04.2010
US 422482 P 13.12.2010
Divided from
EP11766307
Filing language
English
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. Sep 18, 2019

    Deleted, fee unpaid

    Published in Swissreg on 18.09.2019

  2. Apr 11, 2018

    Granted

    Published in Swissreg on 11.04.2018

Parties

Holder

ZYGO CORPORATION

Zygo Corporation

21 Laurel Brook Road, Middlefield, CT 06455-0448, US

Inventor

DECK, Leslie L.

Middletown, CT 06457, US

DE GROOT, Peter J.

Middletown, CT 06457, US

SCHROEDER, Michael

East Hampton, CT 06424, US

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.