SPUTTERING-TARGET MIT WOLFRAMCARBID ODER TITANCARBID
European patent · EP3054029 · Deleted
Register entry
- Publication number
- EP3054029
- Application number
- EP15770392
- Kind
- European patent with effect for Switzerland and Liechtenstein
- Status
- Deleted
- Specification
- Granted
- Filed
- Mar 13, 2015
- Published
- Aug 10, 2016
- Granted
- Aug 15, 2018
- Deleted
- Mar 31, 2019
- Reason
- Annual fee unpaid
- IPC classes
- C23C 14/34 (2006.01)C04B 35/56 (2006.01)H01J 37/34 (2006.01)C04B 35/64 (2006.01)C04B 35/645 (2006.01)C23C 14/35 (2006.01)C23C 14/06 (2006.01)
- Priority
- JP 2014064558 26.03.2014JP 2014065284 27.03.2014
- PCT application
- PCT/JP2015/057414 13.03.2015
- PCT publication
- WO2015/146617 01.10.2015
- Filing language
- Japanese
- Source
- Swissreg
History
What the Federal Institute of Intellectual Property published about this title, newest first.
- Oct 23, 2019
Deleted, fee unpaid
Published in Swissreg on 23.10.2019
- Aug 15, 2018
Granted
Published in Swissreg on 15.08.2018
Parties
Inventor
OHASHI Kazumasa
Kitaibaraki-shi Ibaraki 319-1535, JP
ODA Kunihiro
Kitaibaraki-shi Ibaraki 319-1535, JP
The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.