FOKUSMESSUNGEN MIT SCATTEROMETRIE
European patent · EP3126893 · Deleted
Register entry
- Publication number
- EP3126893
- Application number
- EP15774184
- Kind
- European patent with effect for Switzerland and Liechtenstein
- Status
- Deleted
- Specification
- Granted
- Filed
- Mar 30, 2015
- Published
- Feb 8, 2017
- Granted
- Sep 3, 2025
- Deleted
- Oct 23, 2026
- Reason
- Annual fee unpaid
- IPC classes
- G02B 15/14 (2006.01)H04N 7/18 (2006.01)G03F 7/20 (2006.01)G03F 7/00 (2006.01)
- Priority
- US 201461973151 P 31.03.2014
- PCT application
- PCT/US2015/023405 30.03.2015
- PCT publication
- WO2015/153497 08.10.2015
- Filing language
- English
- Source
- Swissreg
History
What the Federal Institute of Intellectual Property published about this title, newest first.
- Oct 23, 2026
Deleted, fee unpaid
- Status of protective title
- Active → Cancelled
- Cancellation date
- 23.10.2026
- Cause for cancellation
- Non-payment of renewal fee
Published in Swissreg on 23.10.2026
- Jul 15, 2026
Change
Published in Swissreg on 15.07.2026
- Sep 3, 2025
Granted
- Specification status
- Non-published patent application → Granted patent
- Status of protective title
- Initiated → Active
Published in Swissreg on 03.09.2025
Parties
Holder
Kla-Tencor Corporation
Milpitas, California 95035, US
Inventor
EL KODADI, Mohammed
F-38400 Saint Martin D'heres, FR
AMIR, Nuriel
2068101 St. Yokne'am, IL
VOLKOVICH, Roie
3824969 Hadera, IL
LEVINSKI, Vladimir
23100 Migdal Haemek, IL
FELER, Yoel
32163 Haifa, IL
KANDEL, Daniel
76858 Aseret, IL
GUTMAN, Nadav
3091784 Zichron Ya'aqov, IL
PANDEV, Stilian
Santa Clara, California 95050, US
SANKO, Dzmitry
Vallejo, California 94590, US
The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.