SPUTTERING TARGET
European patent · EP3161180 · In force
Register entry
- Publication number
- EP3161180
- Application number
- EP15741114
- Kind
- European patent with effect for Switzerland and Liechtenstein
- Status
- In force
- Specification
- Granted
- Filed
- Jun 26, 2015
- Published
- May 3, 2017
- Granted
- Feb 6, 2019
- Protection ends at the latest
- Jun 25, 2035
- Next annual fee due
- Jun 30, 2027
- IPC classes
- C23C 14/34 (2006.01)H01J 37/34 (2006.01)C23C 14/35 (2006.01)C23C 14/06 (2006.01)
- Priority
- US 201462017909 P 27.06.2014
- PCT application
- PCT/EP2015/001298 26.06.2015
- PCT publication
- WO2015/197196 30.12.2015
- Filing language
- German
- Source
- Swissreg
History
What the Federal Institute of Intellectual Property published about this title, newest first.
- Jul 1, 2026
Next annual fee due on
- Next annual fee due on
- 30.06.2026 → 30.06.2027
Published in Swissreg on 01.07.2026
- Jul 1, 2025
Next annual fee due on
- Next annual fee due on
- 30.06.2025 → 30.06.2026
Published in Swissreg on 01.07.2025
- Jul 1, 2024
Change
Published in Swissreg on 01.07.2024
- Jul 1, 2023
Change
Published in Swissreg on 01.07.2023
- Jul 1, 2022
Change
Published in Swissreg on 01.07.2022
- Apr 3, 2019
Agent entered
- Representative
- Dennemeyer AG, Bahnhofstrasse 23, 6300 Zug
Published in Swissreg on 03.04.2019
- Feb 6, 2019
Granted
Published in Swissreg on 06.02.2019
Parties
Holder
Inventor
WÖRLE, Sabine
6600 Pflach, AT
HAGMANN, Juerg
9468 Sax
POLCIK, Peter
6600 Reutte, AT
KRASSNITZER, Siegfried
6800 Feldkirch, AT
The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.