SUBSTRATTRÄGER

European patent · EP3178109 · Deleted

Register entry

Publication number
EP3178109
Application number
EP16753705
Kind
European patent with effect for Switzerland and Liechtenstein
Status
Deleted
Specification
Granted
Filed
Aug 2, 2016
Published
Jun 14, 2017
Granted
Dec 1, 2021
Deleted
Mar 23, 2023
Reason
Annual fee unpaid
IPC classes
H01L 21/687 (2006.01)
C23C 16/458 (2006.01)
H01L 21/673 (2006.01)
Priority
DE 102015113956 24.08.2015
PCT application
PCT/IB2016/054630 02.08.2016
PCT publication
WO2017/033076 02.03.2017
Filing language
German
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. Mar 23, 2023

    Deleted, fee unpaid

    Published in Swissreg on 23.03.2023

  2. Oct 12, 2022

    Change

    Published in Swissreg on 12.10.2022

  3. Dec 1, 2021

    Granted

    Published in Swissreg on 01.12.2021

Parties

Holder

Meyer Burger (Germany) GmbH

An der Baumschule 6-8, 09337 Hohenstein-Ernstthal, DE

Inventor

KEHR, Mirko

09439 Amtsberg, DE

RASCHKE, Sebastian

09380 Thalheim, DE

ANSORGE, Erik

09127 Chemnitz, DE

BÖHM, Christian

09337 Hohenstein-Ernstthal, DE

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.