SYSTEME UND VERFAHREN FÜR EINZELMAGNETRONSPUTTERN
European patent · EP3189175 · Deleted
Register entry
- Publication number
- EP3189175
- Application number
- EP16831032
- Kind
- European patent with effect for Switzerland and Liechtenstein
- Status
- Deleted
- Specification
- Granted
- Filed
- Jul 15, 2016
- Published
- Jul 12, 2017
- Granted
- Feb 20, 2019
- Deleted
- Jul 31, 2019
- Reason
- Annual fee unpaid
- IPC classes
- C23C 14/35 (2006.01)H01J 37/32 (2006.01)G01R 17/02 (2006.01)H01J 37/34 (2006.01)
- Priority
- US 201514809084 24.07.2015
- PCT application
- PCT/US2016/042389 15.07.2016
- PCT publication
- WO2017/019323 02.02.2017
- Filing language
- English
- Source
- Swissreg
History
What the Federal Institute of Intellectual Property published about this title, newest first.
- Feb 19, 2020
Deleted, fee unpaid
Published in Swissreg on 19.02.2020
- Jun 12, 2019
Owner
- Owner
- Advanced Energy Industries, Inc., 1625 Sharp Point Drive, Fort Collins, CO 80525, USA → AES Global Holdings, Pte. Ltd., 80 Robinson Road, 02-00, Singapore 068898.3, Singapore
Published in Swissreg on 12.06.2019
- Feb 20, 2019
Granted
Published in Swissreg on 20.02.2019
Parties
Inventor
LARSON, Skip, B.
Fort Collins, CO 80526, US
CHRISTIE, David
Fort Collins, CO 80525, US
The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.