VERFAHREN FÜR SPUTTERING UND SPUTTERSYSTEM

European patent · EP3211119 · Deleted

Register entry

Publication number
EP3211119
Application number
EP17166364
Kind
European patent with effect for Switzerland and Liechtenstein
Status
Deleted
Specification
Granted
Filed
Feb 7, 2014
Published
Aug 30, 2017
Granted
Sep 5, 2018
Deleted
Oct 4, 2022
Reason
Annual fee unpaid
IPC classes
C23C 14/35 (2006.01)
C23C 14/34 (2006.01)
H01J 37/34 (2006.01)
Priority
US 201361762439 P 08.02.2013
Filing language
English
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. Oct 4, 2022

    Deleted, fee unpaid

    Published in Swissreg on 04.10.2022

  2. Oct 23, 2018

    Agent entered

    Representative
    Troesch Scheidegger Werner AG, Schwäntenmos 14, 8126 Zumikon

    Published in Swissreg on 23.10.2018

  3. Sep 5, 2018

    Granted

    Published in Swissreg on 05.09.2018

Parties

Holder

Evatec AG

Hauptstrasse 1a, 9477 Trübbach

Agent

Troesch Scheidegger Werner AG

Schwäntenmos 14, 8126 Zumikon

Inventor

RIESCHL, Sven Uwe

7208 Malans

WEICHART, Jürgen

9496 Balzers, LI

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.