SUBSTRATHALTEVORRICHTUNG

European patent · EP3224386 · Deleted

Register entry

Publication number
EP3224386
Application number
EP15797928
Kind
European patent with effect for Switzerland and Liechtenstein
Status
Deleted
Specification
Granted
Filed
Nov 13, 2015
Published
Oct 4, 2017
Granted
Dec 30, 2020
Deleted
Jun 29, 2022
Reason
Annual fee unpaid
IPC classes
C23C 16/458 (2006.01)
H01L 21/687 (2006.01)
Priority
DE 102014117520 28.11.2014
DE 102015118215 26.10.2015
PCT application
PCT/EP2015/076562 13.11.2015
PCT publication
WO2016/083162 02.06.2016
Filing language
German
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. Jun 29, 2022

    Deleted, fee unpaid

    Published in Swissreg on 29.06.2022

  2. Nov 10, 2021

    Change

    Published in Swissreg on 10.11.2021

  3. Dec 30, 2020

    Granted

    Published in Swissreg on 30.12.2020

Parties

Holder

AIXTRON SE

Aixtron SE

Dornkaulstrasse 2, 52134 Herzogenrath, DE

Inventor

BOYD, Adam

B-4720 Kelmis, BE

SUFAN, Eduardo Osman Piniero

47533 Kleve, DE

CLAESSENS, Daniel

52072 Aachen, DE

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.