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European patent · EP3264451 · Deleted

Register entry

Publication number
EP3264451
Application number
EP16755181
Kind
European patent with effect for Switzerland and Liechtenstein
Status
Deleted
Specification
Granted
Filed
Feb 5, 2016
Published
Jan 3, 2018
Granted
Sep 29, 2021
Deleted
Oct 13, 2022
Reason
Annual fee unpaid
IPC classes
H01L 21/677 (2006.01)
H01L 21/02 (2006.01)
H01L 21/67 (2006.01)
Priority
JP 2015038389 27.02.2015
PCT application
PCT/JP2016/053554 05.02.2016
PCT publication
WO2016/136432 01.09.2016
Filing language
Japanese
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. Oct 13, 2022

    Deleted, fee unpaid

    Published in Swissreg on 13.10.2022

  2. Aug 10, 2022

    Change

    Published in Swissreg on 10.08.2022

  3. Sep 29, 2021

    Granted

    Published in Swissreg on 29.09.2021

Parties

Inventor

SHIGETA, Takashi

Tokyo 105-8564, JP

KOMIYA, Munekazu

Tokyo 105-8564, JP

TANIYAMA, Yasushi

Tokyo 105-8564, JP

KAWAI, Toshihiro

Tokyo 105-8564, JP

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.