SUBSTRATBEHANDLUNGSVORRICHTUNG
European patent · EP3341961 · Deleted
Register entry
- Publication number
- EP3341961
- Application number
- EP16753706
- Kind
- European patent with effect for Switzerland and Liechtenstein
- Status
- Deleted
- Specification
- Granted
- Filed
- Aug 2, 2016
- Published
- Jul 4, 2018
- Granted
- Jul 14, 2021
- Deleted
- Feb 23, 2022
- Reason
- Annual fee unpaid
- IPC classes
- H01L 21/687 (2006.01)C23C 16/458 (2006.01)C23C 16/46 (2006.01)H01L 21/67 (2006.01)C23C 14/50 (2006.01)C23C 14/54 (2006.01)C23C 14/56 (2006.01)C23C 16/54 (2006.01)
- Priority
- DE 102015113962 24.08.2015
- PCT application
- PCT/IB2016/054632 02.08.2016
- PCT publication
- WO2017/033077 02.03.2017
- Filing language
- German
- Source
- Swissreg
History
What the Federal Institute of Intellectual Property published about this title, newest first.
- May 25, 2022
Change
Published in Swissreg on 25.05.2022
- Mar 24, 2022
Deleted, fee unpaid
Published in Swissreg on 24.03.2022
- Jul 14, 2021
Granted
Published in Swissreg on 14.07.2021
Parties
Inventor
KEHR, Mirko
09439 Amtsberg, DE
RASCHKE, Sebastian
09380 Thalheim, DE
BÖHM, Christian
09337 Hohenstein-Ernstthal, DE
ANSORGE, Erik
09127 Chemnitz, DE
The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.