WAFERTRÄGER UND VERFAHREN

European patent · EP3385980 · Deleted

Register entry

Publication number
EP3385980
Application number
EP18164949
Kind
European patent with effect for Switzerland and Liechtenstein
Status
Deleted
Specification
Granted
Filed
Mar 29, 2018
Published
Oct 10, 2018
Granted
Nov 24, 2021
Deleted
Oct 25, 2022
Reason
Annual fee unpaid
IPC classes
H01L 23/544 (2006.01)
H01L 21/67 (2006.01)
H01L 21/683 (2006.01)
H01L 21/687 (2006.01)
H01L 21/68 (2006.01)
Priority
US 201715477313 03.04.2017
Filing language
English
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. Oct 25, 2022

    Deleted, fee unpaid

    Published in Swissreg on 25.10.2022

  2. Oct 5, 2022

    Change

    Published in Swissreg on 05.10.2022

  3. Nov 24, 2021

    Granted

    Published in Swissreg on 24.11.2021

Parties

Inventor

WAN, Jianwei

Woodbury, 55129, US

CHOI, Chankyung

Chandler 85249-1220, US

KIM, Peter Wook

Stillwater, 55082, US

TUNGARE, Mihir

Gilbert AZ 85298, US

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.