WAFERTRÄGER UND VERFAHREN
European patent · EP3385980 · Deleted
Register entry
- Publication number
- EP3385980
- Application number
- EP18164949
- Kind
- European patent with effect for Switzerland and Liechtenstein
- Status
- Deleted
- Specification
- Granted
- Filed
- Mar 29, 2018
- Published
- Oct 10, 2018
- Granted
- Nov 24, 2021
- Deleted
- Oct 25, 2022
- Reason
- Annual fee unpaid
- IPC classes
- H01L 23/544 (2006.01)H01L 21/67 (2006.01)H01L 21/683 (2006.01)H01L 21/687 (2006.01)H01L 21/68 (2006.01)
- Priority
- US 201715477313 03.04.2017
- Filing language
- English
- Source
- Swissreg
History
What the Federal Institute of Intellectual Property published about this title, newest first.
- Oct 25, 2022
Deleted, fee unpaid
Published in Swissreg on 25.10.2022
- Oct 5, 2022
Change
Published in Swissreg on 05.10.2022
- Nov 24, 2021
Granted
Published in Swissreg on 24.11.2021
Parties
Inventor
WAN, Jianwei
Woodbury, 55129, US
CHOI, Chankyung
Chandler 85249-1220, US
KIM, Peter Wook
Stillwater, 55082, US
TUNGARE, Mihir
Gilbert AZ 85298, US
The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.