MAGNETRONSPUTTERVERFAHREN

European patent · EP3452634 · In force

Register entry

Publication number
EP3452634
Application number
EP16719871
Kind
European patent with effect for Switzerland and Liechtenstein
Status
In force
Specification
Granted
Filed
May 2, 2016
Published
Mar 13, 2019
Granted
Sep 6, 2023
Protection ends at the latest
May 1, 2036
Next annual fee due
May 31, 2027
IPC classes
C23C 14/34 (2006.01)
C23C 14/35 (2006.01)
C23C 14/54 (2006.01)
H01J 37/34 (2006.01)
PCT application
PCT/EP2016/059776 02.05.2016
PCT publication
WO2017/190763 09.11.2017
Filing language
English
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. Jun 1, 2026

    Change

    Published in Swissreg on 01.06.2026

  2. Jun 1, 2025

    Change

    Published in Swissreg on 01.06.2025

  3. Jul 17, 2024

    Change

    Published in Swissreg on 17.07.2024

  4. Jun 2, 2024

    Change

    Published in Swissreg on 02.06.2024

  5. Sep 13, 2023

    Agent entered

    Representative
    MICHELI & CIE SA, 122, rue de Genève,, CP 61, 1226 Thônex

    Published in Swissreg on 13.09.2023

  6. Sep 6, 2023

    Granted

    Published in Swissreg on 06.09.2023

Parties

Holder

Applied Materials, Inc.

3050 Bowers Avenue, Santa Clara, CA 95054, US

Agent

MICHELI & CIE SA

122, rue de Genève, CP 61, 1226 Thônex

Inventor

PARK, Hyun Chan

63755 Alzenau, DE

BHOOLOKAM, Ajay Sampath

60322 Frankfurt, DE

GEBELE, Thomas

63579 Freigericht, DE

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.