HALTEVORRICHTUNG

European patent · EP3477691 · Deleted

Register entry

Publication number
EP3477691
Application number
EP17815100
Kind
European patent with effect for Switzerland and Liechtenstein
Status
Deleted
Specification
Granted
Filed
May 26, 2017
Published
May 1, 2019
Granted
Mar 9, 2022
Deleted
Dec 23, 2022
Reason
Annual fee unpaid
IPC classes
H01L 21/67 (2006.01)
H01L 21/687 (2006.01)
H01J 37/32 (2006.01)
H01J 37/34 (2006.01)
Priority
JP 2016124984 23.06.2016
PCT application
PCT/JP2017/019685 26.05.2017
PCT publication
WO2017/221631 28.12.2017
Filing language
Japanese
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. Jan 18, 2023

    Change

    Published in Swissreg on 18.01.2023

  2. Dec 23, 2022

    Deleted, fee unpaid

    Published in Swissreg on 23.12.2022

  3. Mar 9, 2022

    Granted

    Published in Swissreg on 09.03.2022

Parties

Inventor

TASHIRO Yukihito

Chigasaki-shi Kanagawa 253-8543, JP

FUKUMOTO Hidenori

Chigasaki-shi Kanagawa 253-8543, JP

TERASHIMA Mitsuki

Chigasaki-shi Kanagawa 253-0085, JP

HIDAKA Kosuke

Chigasaki-shi Kanagawa 253-0085, JP

ITOH Junichi

Chigasaki-shi Kanagawa 253-8543, JP

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.