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European patent · EP3539150 · In force

Register entry

Publication number
EP3539150
Application number
EP17870417
Kind
European patent with effect for Switzerland and Liechtenstein
Status
In force
Specification
Granted
Filed
Oct 25, 2017
Published
Sep 18, 2019
Granted
Jun 15, 2022
Protection ends at the latest
Oct 24, 2037
Next annual fee due
Oct 31, 2026
IPC classes
H01L 21/67 (2006.01)
H01J 37/32 (2006.01)
H05H 1/46 (2006.01)
H01L 21/3065 (2006.01)
H01L 21/02 (2006.01)
Priority
US 201615346920 09.11.2016
PCT application
PCT/US2017/058313 25.10.2017
PCT publication
WO2018/089196 17.05.2018
Filing language
English
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. Nov 1, 2025

    Change

    Published in Swissreg on 01.11.2025

  2. Nov 1, 2024

    Change

    Published in Swissreg on 01.11.2024

  3. Nov 1, 2023

    Change

    Published in Swissreg on 01.11.2023

  4. Apr 26, 2023

    Change

    Published in Swissreg on 26.04.2023

  5. Nov 17, 2022

    Change

    Published in Swissreg on 17.11.2022

  6. Jun 20, 2022

    Agent entered

    Representative
    MICHELI & CIE SA, 122, rue de Genève,, CP 61, 1226 Thônex

    Published in Swissreg on 20.06.2022

  7. Jun 15, 2022

    Granted

    Published in Swissreg on 15.06.2022

Parties

Holder

Lam Research Corporation

LAM Research Corporation

4650 Cushing Parkway, Fremont, CA 94538, US

Agent

MICHELI & CIE SA

122, rue de Genève, CP 61, 1226 Thônex

Inventor

GREGOR, Mariusch

Fremont CA 94538, US

TRUSSELL, David

Fremont CA 94538, US

LILL, Thorsten

Fremont CA 94538, US

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.