BODEN- UND MITTELRANDRINGE

European patent · EP3566245 · Deleted

Register entry

Publication number
EP3566245
Application number
EP17932862
Kind
European patent with effect for Switzerland and Liechtenstein
Status
Deleted
Specification
Granted
Filed
Nov 21, 2017
Published
Nov 13, 2019
Granted
Mar 17, 2021
Deleted
Jun 28, 2022
Reason
Annual fee unpaid
IPC classes
H01L 21/687 (2006.01)
H01L 21/683 (2006.01)
H01L 21/67 (2006.01)
PCT application
PCT/US2017/062769 21.11.2017
PCT publication
WO2019/103722 31.05.2019
Filing language
English
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. Jun 28, 2022

    Deleted, fee unpaid

    Published in Swissreg on 28.06.2022

  2. Jan 26, 2022

    Change

    Published in Swissreg on 26.01.2022

  3. Mar 17, 2021

    Granted

    Published in Swissreg on 17.03.2021

Parties

Holder

Lam Research Corporation

4650 Cushing Parkway, Fremont, CA 94538, US

Inventor

TOKAIRIN, Shawn E S

Fremont California 94539, US

RATHNASINGHE, Hiran Rajitha

Fremont California 94538, US

MCCHESNEY, Jon

Fremont California 94539, US

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.