EINGEBETTETE WAFERINSPEKTION
European patent · EP3640630 · In force
Register entry
- Publication number
- EP3640630
- Application number
- EP18201303
- Kind
- European patent with effect for Switzerland and Liechtenstein
- Status
- In force
- Specification
- Granted
- Filed
- Oct 18, 2018
- Published
- Apr 22, 2020
- Granted
- Mar 11, 2026
- Protection ends at the latest
- Oct 17, 2038
- Next annual fee due
- Oct 31, 2026
- IPC classes
- G01N 21/95 (2006.01)G01N 21/958 (2006.01)H01L 21/66 (2006.01)H01L 21/67 (2006.01)G06T 7/00 (2017.01)G01N 21/88 (2006.01)
- Filing language
- English
- Source
- Swissreg
History
What the Federal Institute of Intellectual Property published about this title, newest first.
- Mar 11, 2026
Granted
- Specification status
- Non-published patent application → Granted patent
- Status of protective title
- Initiated → Active
Published in Swissreg on 11.03.2026
Parties
Inventor
RINGSLEBEN, Frederic
04736 Waldheim, DE
SCHNEIDER, Germar
01109 Dresden, DE
MOTHES, Dirk
01109 Dresden, DE
FEHR, Matthias
01109 Dresden, DE
The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.