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European patent · EP3648553 · In force

Register entry

Publication number
EP3648553
Application number
EP18823378
Kind
European patent with effect for Switzerland and Liechtenstein
Status
In force
Specification
Granted
Filed
Jun 26, 2018
Published
May 6, 2020
Granted
May 19, 2021
Protection ends at the latest
Jun 25, 2038
Next annual fee due
Jun 30, 2027
IPC classes
H01J 37/32 (2006.01)
H01J 37/34 (2006.01)
H05H 1/46 (2006.01)
C23C 14/34 (2006.01)
B01J 19/08 (2006.01)
Priority
WO PCT/JP2017/023611 27.06.2017
WO PCT/JP2017/023603 27.06.2017
JP 2018017549 02.02.2018
PCT application
PCT/JP2018/024145 26.06.2018
PCT publication
WO2019/004183 03.01.2019
Filing language
Japanese
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. Jul 1, 2026

    Next annual fee due on

    Next annual fee due on
    30.06.2026 → 30.06.2027

    Published in Swissreg on 01.07.2026

  2. Jul 1, 2025

    Next annual fee due on

    Next annual fee due on
    30.06.2025 → 30.06.2026

    Published in Swissreg on 01.07.2025

  3. Jul 4, 2024

    Change

    Published in Swissreg on 04.07.2024

  4. Jul 1, 2023

    Change

    Published in Swissreg on 01.07.2023

  5. Jul 1, 2022

    Change

    Published in Swissreg on 01.07.2022

  6. Mar 30, 2022

    Change

    Published in Swissreg on 30.03.2022

  7. Jun 1, 2021

    Agent entered

    Representative
    Novagraaf International SA, Chemin de l'Echo 3, 1213 Onex

    Published in Swissreg on 01.06.2021

  8. May 19, 2021

    Granted

    Published in Swissreg on 19.05.2021

Parties

Holder

Canon Anelva Corporation

2-5-1, Kurigi Asao-ku, Kawasaki-shi Kanagawa 215-8550, JP

Agent

Novagraaf International SA

Chemin de l'Echo 3, 1213 Onex

Inventor

INOUE, Tadashi

Kawasaki-shi Kanagawa 215-8550, JP

TANABE, Masaharu

Kawasaki-shi Kanagawa 215-8550, JP

SATO, Tatsunori

Kawasaki-shi Kanagawa 215-8550, JP

TSUCHIYA, Nobuaki

Kawasaki-shi Kanagawa 215-8550, JP

SASAMOTO, Hiroshi

Kawasaki-shi Kanagawa 215-8550, JP

SEKIYA, Kazunari

Kawasaki-shi Kanagawa 215-8550, JP

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.