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European patent · EP3648554 · In force

Register entry

Publication number
EP3648554
Application number
EP18824433
Kind
European patent with effect for Switzerland and Liechtenstein
Status
In force
Specification
Granted
Filed
Jun 26, 2018
Published
May 6, 2020
Granted
Jun 2, 2021
Protection ends at the latest
Jun 25, 2038
Next annual fee due
Jun 30, 2027
IPC classes
H05H 1/46 (2006.01)
B01J 19/08 (2006.01)
C23C 14/34 (2006.01)
H01L 21/3065 (2006.01)
H01J 37/32 (2006.01)
H01J 37/34 (2006.01)
Priority
WO PCT/JP2017/023611 27.06.2017
WO PCT/JP2017/023603 27.06.2017
JP 2018017548 02.02.2018
PCT application
PCT/JP2018/024154 26.06.2018
PCT publication
WO2019/004192 03.01.2019
Filing language
Japanese
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. Jul 1, 2026

    Next annual fee due on

    Next annual fee due on
    30.06.2026 → 30.06.2027

    Published in Swissreg on 01.07.2026

  2. Jul 1, 2025

    Next annual fee due on

    Next annual fee due on
    30.06.2025 → 30.06.2026

    Published in Swissreg on 01.07.2025

  3. Jul 4, 2024

    Change

    Published in Swissreg on 04.07.2024

  4. Jul 1, 2023

    Change

    Published in Swissreg on 01.07.2023

  5. Jul 1, 2022

    Change

    Published in Swissreg on 01.07.2022

  6. Apr 13, 2022

    Change

    Published in Swissreg on 13.04.2022

  7. Aug 4, 2021

    Agent entered

    Representative
    Novagraaf International SA, Chemin de l'Echo 3, 1213 Onex

    Published in Swissreg on 04.08.2021

  8. Jun 2, 2021

    Granted

    Published in Swissreg on 02.06.2021

Parties

Holder

Canon Anelva Corporation

2-5-1, Kurigi Asao-ku, Kawasaki-shi Kanagawa 215-8550, JP

Agent

Novagraaf International SA

Chemin de l'Echo 3, 1213 Onex

Inventor

MORIWAKI, Takayuki

Kawasaki-shi Kanagawa 215-8550, JP

TAKEDA, Atsushi

Kawasaki-shi Kanagawa 215-8550, JP

INOUE, Tadashi

Kawasaki-shi Kanagawa 215-8550, JP

TANABE, Masaharu

Kawasaki-shi Kanagawa 215-8550, JP

SATO, Tatsunori

Kawasaki-shi Kanagawa 215-8550, JP

TSUCHIYA, Nobuaki

Kawasaki-shi Kanagawa 215-8550, JP

SASAMOTO, Hiroshi

Kawasaki-shi Kanagawa 215-8550, JP

SEKIYA, Kazunari

Kawasaki-shi Kanagawa 215-8550, JP

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.