MAGNETSTABBAUGRUPPE FÜR EINE ROTIERENDE TARGETKATHODE

European patent · EP3669394 · Deleted

Register entry

Publication number
EP3669394
Application number
EP18846977
Kind
European patent with effect for Switzerland and Liechtenstein
Status
Deleted
Specification
Granted
Filed
Jul 16, 2018
Published
Jun 24, 2020
Granted
Aug 24, 2022
Deleted
Feb 23, 2024
Reason
Annual fee unpaid
IPC classes
H01J 37/34 (2006.01)
C23C 14/35 (2006.01)
Priority
US 201715678962 16.08.2017
PCT application
PCT/US2018/042318 16.07.2018
PCT publication
WO2019/036136 21.02.2019
Filing language
English
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. Feb 23, 2024

    Deleted, fee unpaid

    Published in Swissreg on 23.02.2024

  2. Jul 5, 2023

    Change

    Published in Swissreg on 05.07.2023

  3. Aug 24, 2022

    Granted

    Published in Swissreg on 24.08.2022

Parties

Holder

Sputtering Components, Inc.

375 Alexander Drive SW, Owatonna, Minnesota 55021, US

Inventor

CROWLEY, Daniel Theodore

Owatonna, Minnesota 55060, US

MORSE, Patrick Lawrence

Tucson, Arizona 85745, US

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.