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European patent · EP3692567 · Deleted

Register entry

Publication number
EP3692567
Application number
EP18864801
Kind
European patent with effect for Switzerland and Liechtenstein
Status
Deleted
Specification
Granted
Filed
Oct 2, 2018
Published
Aug 12, 2020
Granted
Aug 7, 2024
Deleted
May 23, 2025
Reason
Annual fee unpaid
IPC classes
H01L 21/3065 (2006.01)
H01L 21/311 (2006.01)
H01L 21/3213 (2006.01)
H01L 21/67 (2006.01)
H01L 29/66 (2006.01)
H01L 29/78 (2006.01)
H01J 37/32 (2006.01)
Priority
US 201762569443 P 06.10.2017
US 201762599613 P 15.12.2017
US 201816148939 01.10.2018
PCT application
PCT/US2018/054001 02.10.2018
PCT publication
WO2019/070737 11.04.2019
Filing language
English
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. Jun 18, 2025

    Change

    Published in Swissreg on 18.06.2025

  2. May 23, 2025

    Deleted, fee unpaid

    Status of protective title
    Active → Cancelled
    Cancellation date
    23.05.2025
    Cause for cancellation
    Non-payment of renewal fee

    Published in Swissreg on 23.05.2025

  3. Aug 7, 2024

    Granted

    Published in Swissreg on 07.08.2024

Parties

Holder

Lam Research Corporation

4650 Cushing Parkway, Fremont, CA 94538, US

Inventor

MUKHERJEE, Tamal

Fremont, California 94536, US

KANARIK, Keren Jacobs

Los Altos, California 94024, US

YANG, Wenbing

Fremont, California 94538, US

TAN, Samantha

Fremont, California 94555, US

PAN, Yang

Los Altos, California 94024, US

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.