HALBLEITERREINIGERSYSTEME UND VERFAHREN

European patent · EP3693990 · In force

Register entry

Publication number
EP3693990
Application number
EP20157759
Kind
European patent with effect for Switzerland and Liechtenstein
Status
In force
Specification
Granted
Filed
Jun 23, 2012
Published
Aug 12, 2020
Granted
Jun 7, 2023
Protection ends at the latest
Jun 22, 2032
Next annual fee due
Jun 30, 2027
IPC classes
H01L 21/673 (2006.01)
H01L 21/67 (2006.01)
H01L 21/687 (2006.01)
Priority
US 201161500608 P 23.06.2011
Filing language
English
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. Jul 1, 2026

    Next annual fee due on

    Next annual fee due on
    30.06.2026 → 30.06.2027

    Published in Swissreg on 01.07.2026

  2. Jul 1, 2025

    Next annual fee due on

    Next annual fee due on
    30.06.2025 → 30.06.2026

    Published in Swissreg on 01.07.2025

  3. Jul 1, 2024

    Change

    Published in Swissreg on 01.07.2024

  4. Apr 24, 2024

    Change

    Published in Swissreg on 24.04.2024

  5. Apr 17, 2024

    Change

    Published in Swissreg on 17.04.2024

  6. Nov 30, 2023

    Agent entered

    Representative
    VALIPAT, c/o BOVARD LTD, Optingenstrasse 16, 3013 Bern

    Published in Swissreg on 30.11.2023

  7. Nov 23, 2023

    Change

    Published in Swissreg on 23.11.2023

  8. Jun 7, 2023

    Granted

    Published in Swissreg on 07.06.2023

Parties

Holder

Brooks Automation (Germany) GmbH

Daimlerstraße 7, 78256 Steißlingen, DE

Agent

VALIPAT c/o BOVARD LTD

Optingenstrasse 16, 3013 Bern

Inventor

REBSTOCK, Lutz

78315 Radolfzell, DE

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.