PLASMA-VERARBEITUNGSWERKZEUG

European patent · EP3794628 · Deleted

Register entry

Publication number
EP3794628
Application number
EP19787352
Kind
European patent with effect for Switzerland and Liechtenstein
Status
Deleted
Specification
Granted
Filed
Oct 1, 2019
Published
Mar 24, 2021
Granted
Dec 22, 2021
Deleted
May 25, 2023
Reason
Annual fee unpaid
IPC classes
H01J 37/32 (2006.01)
C23C 16/509 (2006.01)
Priority
GB 201816059 02.10.2018
PCT application
PCT/GB2019/052763 01.10.2019
PCT publication
WO2020/070482 09.04.2020
Filing language
English
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. May 25, 2023

    Deleted, fee unpaid

    Published in Swissreg on 25.05.2023

  2. Nov 2, 2022

    Change

    Published in Swissreg on 02.11.2022

  3. Dec 22, 2021

    Granted

    Published in Swissreg on 22.12.2021

Parties

Holder

Oxford Instruments Nanotechnology Tools Limited

Tubney Woods, Abingdon, Oxon OX13 5QX, GB

Inventor

PETER, Annika

Oxon OX13 5QX, GB

COOKE, Mike

Oxon, OX 13 5QX, GB

PROUDFOOT, Gary

Oxon OX13 5QX, GB

WATERS, Gareth

Oxon, OX13 5QX, GB

O'MAHONY, Aileen

Oxon OX13 5QX, GB

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.