HERSTELLUNG VON BEUGUNGSGITTERN

European patent · EP3814840 · In force

Register entry

Publication number
EP3814840
Application number
EP19824762
Kind
European patent with effect for Switzerland and Liechtenstein
Status
In force
Specification
Granted
Filed
Jun 27, 2019
Published
May 5, 2021
Granted
Nov 5, 2025
Protection ends at the latest
Jun 26, 2039
Next annual fee due
Jun 30, 2026
IPC classes
G03F 7/00 (2006.01)
G03F 7/20 (2006.01)
G03F 1/80 (2012.01)
H01L 21/033 (2006.01)
H01L 21/02 (2006.01)
H01L 21/306 (2006.01)
G02B 6/124 (2006.01)
G02B 6/136 (2006.01)
G02B 5/18 (2006.01)
Priority
US 201862691421 P 28.06.2018
US 201862692286 P 29.06.2018
PCT application
PCT/US2019/039615 27.06.2019
PCT publication
WO2020/006308 02.01.2020
Filing language
English
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. Sep 16, 2026

    Change

    Published in Swissreg on 16.09.2026

  2. Nov 5, 2025

    Granted

    Specification status
    Non-published patent application → Granted patent
    Status of protective title
    Initiated → Active

    Published in Swissreg on 05.11.2025

Parties

Holder

Applied Materials, Inc.

3050 Bowers Avenue, Santa Clara, California 95054, US

Inventor

GODET, Ludovic

Sunnyvale, California 94086, US

MCMILLAN, Wayne

San Jose, California 95120, US

MEYER TIMMERMAN THIJSSEN, Rutger

San Jose, California 95128, US

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.