GASPHASENEPITAXIEVERFAHREN

European patent · EP3839104 · Deleted

Register entry

Publication number
EP3839104
Application number
EP20000460
Kind
European patent with effect for Switzerland and Liechtenstein
Status
Deleted
Specification
Granted
Filed
Dec 11, 2020
Published
Jun 23, 2021
Granted
Nov 2, 2022
Deleted
Jul 23, 2024
Reason
Annual fee unpaid
IPC classes
C30B 25/16 (2006.01)
C23C 16/30 (2006.01)
C30B 25/18 (2006.01)
C30B 29/40 (2006.01)
C30B 29/42 (2006.01)
H01L 21/02 (2006.01)
Priority
DE 102019008930 20.12.2019
Filing language
German
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. Jul 23, 2024

    Deleted, fee unpaid

    Published in Swissreg on 23.07.2024

  2. Sep 13, 2023

    Change

    Published in Swissreg on 13.09.2023

  3. Nov 2, 2022

    Granted

    Published in Swissreg on 02.11.2022

Parties

Inventor

Keller, Gregor

74080 Heilbronn, DE

Wächter, Clemens

74348 Lauffen am Neckar, DE

Fuhrmann, Daniel

74081 Heilbronn, DE

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.