PLASMABEHANDLUNGSVORRICHTUNG

European patent · EP3843122 · Deleted

Register entry

Publication number
EP3843122
Application number
EP21150886
Kind
European patent with effect for Switzerland and Liechtenstein
Status
Deleted
Specification
Granted
Filed
Jan 11, 2021
Published
Jun 30, 2021
Granted
Dec 14, 2022
Deleted
Aug 24, 2024
Reason
Annual fee unpaid
IPC classes
H01J 37/32 (2006.01)
H01L 21/677 (2006.01)
Priority
JP 2019234389 25.12.2019
Filing language
Japanese
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. Aug 24, 2024

    Deleted, fee unpaid

    Published in Swissreg on 24.08.2024

  2. Oct 25, 2023

    Change

    Published in Swissreg on 25.10.2023

  3. Dec 14, 2022

    Granted

    Published in Swissreg on 14.12.2022

Parties

Holder

Plasma Ion Assist Co., Ltd.

117, Mori-cho Fushimi-ku, Kyoto-shi, Kyoto 612-8373, JP

Inventor

SUZUKI, Hirokazu

Kyoto 617-0002, JP

SUZUKI, Yasuo

Shiga 520-0225, JP

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.