STRAHLUNGSBILDGEBUNGSVORRICHTUNG

European patent · EP3869236 · In force

Register entry

Publication number
EP3869236
Application number
EP19874018
Kind
European patent with effect for Switzerland and Liechtenstein
Status
In force
Specification
Granted
Filed
Oct 9, 2019
Published
Aug 25, 2021
Granted
May 3, 2023
Protection ends at the latest
Oct 8, 2039
Next annual fee due
Oct 31, 2026
IPC classes
G01T 1/20 (2006.01)
H01L 27/144 (2006.01)
H01L 27/146 (2006.01)
Priority
JP 2018196746 18.10.2018
PCT application
PCT/JP2019/039880 09.10.2019
PCT publication
WO2020/080231 23.04.2020
Filing language
Japanese
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. Nov 1, 2025

    Change

    Published in Swissreg on 01.11.2025

  2. Nov 1, 2024

    Change

    Published in Swissreg on 01.11.2024

  3. Mar 13, 2024

    Change

    Published in Swissreg on 13.03.2024

  4. Nov 1, 2023

    Change

    Published in Swissreg on 01.11.2023

  5. Jul 14, 2023

    Agent entered

    Representative
    Servopatent GmbH, Bühlstrasse 1, 8125 Zollikerberg

    Published in Swissreg on 14.07.2023

  6. May 3, 2023

    Granted

    Published in Swissreg on 03.05.2023

Parties

Inventor

ARITAKE, Takao

Hamamatsu-shi, Shizuoka 435-8558, JP

ICHIKAWA, Minoru

Hamamatsu-shi, Shizuoka 435-8558, JP

FUKAMIZU, Seiji

Hamamatsu-shi, Shizuoka 435-8558, JP

NAMBA, Shuhei

Hamamatsu-shi, Shizuoka 435-8558, JP

OKADA, Haruyoshi

Hamamatsu-shi, Shizuoka 435-8558, JP

KYUSHIMA, Ryuji

Hamamatsu-shi, Shizuoka 435-8558, JP

FUJITA, Kazuki

Hamamatsu-shi, Shizuoka 435-8558, JP

SAWADA, Junichi

Hamamatsu-shi, Shizuoka 435-8558, JP

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.