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European patent · EP3869543 · Deleted

Register entry

Publication number
EP3869543
Application number
EP21157403
Kind
European patent with effect for Switzerland and Liechtenstein
Status
Deleted
Specification
Granted
Filed
Feb 16, 2021
Published
Aug 25, 2021
Granted
Dec 20, 2023
Deleted
Sep 24, 2024
Reason
Annual fee unpaid
IPC classes
H01L 21/67 (2006.01)
Priority
JP 2020027481 20.02.2020
Filing language
English
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. Oct 30, 2024

    Change

    Published in Swissreg on 30.10.2024

  2. Sep 24, 2024

    Deleted, fee unpaid

    Status of protective title
    Active → Cancelled
    Cancellation date
    24.09.2024
    Cause for cancellation
    Non-payment of renewal fee

    Published in Swissreg on 24.09.2024

  3. Dec 20, 2023

    Granted

    Published in Swissreg on 20.12.2023

Parties

Holder

Tokyo Electron Limited

3-1, Akasaka 5-chome Minato-ku, Tokyo 107-6325, JP

Inventor

KATO, Yoshiyasu

Nirasaki City, Yamanashi 407-8511, JP

KASAI, Shigeru

Nirasaki City, Yamanashi 407-8511, JP

NAKAYAMA, Hiroyuki

Nirasaki City, Yamanashi 407-8511, JP

AKAIKE, Yutaka

Nirasaki City, Yamanashi 407-8511, JP

KOMIYA, Hiroaki

Nirasaki City, Yamanashi 407-8511, JP

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.