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European patent · EP3884514 · In force

Register entry

Publication number
EP3884514
Application number
EP19808783
Kind
European patent with effect for Switzerland and Liechtenstein
Status
In force
Specification
Granted
Filed
Nov 22, 2019
Published
Sep 29, 2021
Granted
Jun 21, 2023
Protection ends at the latest
Nov 21, 2039
Next annual fee due
Nov 30, 2026
IPC classes
H01L 21/687 (2006.01)
Priority
EP 18208030 23.11.2018
PCT application
PCT/EP2019/082193 22.11.2019
PCT publication
WO2020/104639 28.05.2020
Filing language
English
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. Dec 1, 2025

    Change

    Published in Swissreg on 01.12.2025

  2. Dec 1, 2024

    Change

    Published in Swissreg on 01.12.2024

  3. May 1, 2024

    Change

    Published in Swissreg on 01.05.2024

  4. Dec 13, 2023

    Change

    Published in Swissreg on 13.12.2023

  5. Dec 1, 2023

    Change

    Published in Swissreg on 01.12.2023

  6. Jun 21, 2023

    Granted

    Published in Swissreg on 21.06.2023

Parties

Holder

Atotech Deutschland GmbH & Co. KG

Erasmusstraße 20, 10553 Berlin, DE

Inventor

ICKERT, Siegfried

10553 Berlin, DE

POLLACK, Steffen

10553 Berlin, DE

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.