SUBSTRATBEARBEITUNGSANLAGE

European patent · EP3916764 · Deleted

Register entry

Publication number
EP3916764
Application number
EP21177601
Kind
European patent with effect for Switzerland and Liechtenstein
Status
Deleted
Specification
Granted
Filed
Jan 17, 2013
Published
Dec 1, 2021
Granted
Sep 14, 2022
Deleted
Aug 24, 2023
Reason
Annual fee unpaid
IPC classes
H01L 21/67 (2006.01)
H01L 21/677 (2006.01)
Priority
DE 102012100929 06.02.2012
Filing language
German
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. Aug 24, 2023

    Deleted, fee unpaid

    Published in Swissreg on 24.08.2023

  2. Jul 26, 2023

    Change

    Published in Swissreg on 26.07.2023

  3. Sep 14, 2022

    Granted

    Published in Swissreg on 14.09.2022

Parties

Holder

Meyer Burger (Germany) GmbH

An der Baumschule 6-8, 09337 Hohenstein-Ernstthal, DE

Inventor

Kehr, Mirko

09439 Amtsberg, DE

Mai, Joachim

04603 Nobitz, DE

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.