VAKUUMSYSTEMCLUSTERSWERKZEUG
European patent · EP3957767 · In force
Register entry
- Publication number
- EP3957767
- Application number
- EP20191464
- Kind
- European patent with effect for Switzerland and Liechtenstein
- Status
- In force
- Specification
- Granted
- Filed
- Aug 18, 2020
- Published
- Feb 23, 2022
- Granted
- Dec 10, 2025
- Protection ends at the latest
- Aug 17, 2040
- Next annual fee due
- Aug 31, 2027
- IPC classes
- C23C 14/56 (2006.01)C23C 16/44 (2006.01)C23C 16/54 (2006.01)H01L 21/67 (2006.01)
- Filing language
- English
- Source
- Swissreg
History
What the Federal Institute of Intellectual Property published about this title, newest first.
- Oct 21, 2026
Change
Published in Swissreg on 21.10.2026
- Sep 1, 2026
Next annual fee due on
- Next annual fee due on
- 31.08.2026 → 31.08.2027
Published in Swissreg on 01.09.2026
- Dec 17, 2025
Agent entered
- Representative
- Keller Schneider Patent- und Markenanwälte AG, Monbijoustrasse 68, Postfach, 3000 Bern 14
Published in Swissreg on 17.12.2025
- Dec 10, 2025
Granted
- Specification status
- Non-published patent application → Granted patent
- Status of protective title
- Initiated → Active
Published in Swissreg on 10.12.2025
Parties
Inventor
Guerra, Carlos
8600 Dübendorf
Petho, Laszlo
8600 Dübendorf
Michler, Johann
8600 Dübendorf
Szkudlarek, Aleksandra
Poland, PL
The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.