THERMISCHER DIFFUSOR FÜR EINEN HALBLEITERWAFERHALTER

European patent · EP4022672 · Deleted

Register entry

Publication number
EP4022672
Application number
EP20768465
Kind
European patent with effect for Switzerland and Liechtenstein
Status
Deleted
Specification
Granted
Filed
Aug 27, 2020
Published
Jul 6, 2022
Granted
Jun 12, 2024
Deleted
Mar 25, 2025
Reason
Annual fee unpaid
IPC classes
H01L 21/67 (2006.01)
H01L 21/683 (2006.01)
Priority
US 201916552790 27.08.2019
PCT application
PCT/US2020/048159 27.08.2020
PCT publication
WO2021/041643 04.03.2021
Filing language
English
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. Apr 23, 2025

    Change

    Published in Swissreg on 23.04.2025

  2. Mar 25, 2025

    Deleted, fee unpaid

    Status of protective title
    Active → Cancelled
    Cancellation date
    25.03.2025
    Cause for cancellation
    Non-payment of renewal fee

    Published in Swissreg on 25.03.2025

  3. Jun 12, 2024

    Granted

    Published in Swissreg on 12.06.2024

Parties

Inventor

WALLINGER, Martin

5441 Abtenau, AT

PARKINSON, Blake

St Louis., MO 63146, US

ZHANG, Sanhong

Ballwin, MO 63021, GB

PTASIENSKI, Kevin

O'Fallon, MO 63368, US

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.