SUBSTRATTRÄGER FÜR HALBLEITERVERARBEITUNGSSYSTEME
European patent · EP4170062 · In force
Register entry
- Publication number
- EP4170062
- Application number
- EP22203123
- Kind
- European patent with effect for Switzerland and Liechtenstein
- Status
- In force
- Specification
- Granted
- Filed
- Oct 21, 2022
- Published
- Apr 26, 2023
- Granted
- May 20, 2026
- Protection ends at the latest
- Oct 20, 2042
- Next annual fee due
- Oct 31, 2026
- IPC classes
- C23C 16/44 (2006.01)C23C 16/455 (2006.01)C23C 16/458 (2006.01)C23C 16/52 (2006.01)
- Priority
- US 202163270380 P 21.10.2021
- Filing language
- English
- Source
- Swissreg
History
What the Federal Institute of Intellectual Property published about this title, newest first.
- May 20, 2026
Granted
- Specification status
- Non-published patent application → Granted patent
- Status of protective title
- Initiated → Active
Published in Swissreg on 20.05.2026
Parties
Inventor
HUANG, Shujin
1322 AP Almere, NL
SU, Junwei
1322 AP Almere, NL
WANG, Wentao
1322 AP Almere, NL
CHEN, Zhizhong
1322 AP Almere, NL
LIN, Xing
1322 AP Almere, NL
XIANG, Jiwen
1322 AP Almere, NL
The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.