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European patent · EP4253596 · Deleted

Register entry

Publication number
EP4253596
Application number
EP21896855
Kind
European patent with effect for Switzerland and Liechtenstein
Status
Deleted
Specification
Granted
Filed
Nov 17, 2021
Published
Oct 4, 2023
Granted
Apr 9, 2025
Deleted
Jun 23, 2026
Reason
Annual fee unpaid
IPC classes
C23C 16/44 (2006.01)
C23C 16/455 (2006.01)
C23C 16/458 (2006.01)
H01L 21/67 (2006.01)
H01L 21/687 (2006.01)
Priority
CN 202011340051 25.11.2020
PCT application
PCT/CN2021/131149 17.11.2021
PCT publication
WO2022/111354 02.06.2022
Filing language
Chinese
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. Jun 23, 2026

    Deleted, fee unpaid

    Status of protective title
    Active → Cancelled
    Cancellation date
    23.06.2026
    Cause for cancellation
    Non-payment of renewal fee

    Published in Swissreg on 23.06.2026

  2. Feb 18, 2026

    Change

    Published in Swissreg on 18.02.2026

  3. Apr 9, 2025

    Granted

    Specification status
    Non-published patent application → Granted patent
    Status of protective title
    Initiated → Active

    Published in Swissreg on 09.04.2025

Parties

Holder

Beijing NAURA Microelectronics Equipment Co., Ltd.

No. 8 Wenchang Avenue Beijing Economic-Technological Development Area, Beijing 100176, CN

Inventor

REN, Xiaoyan

Beijing 100176, CN

WANG, Yongfei

Beijing 100176, CN

SHI, Xiaoping

Beijing 100176, CN

ZHENG, Bo

Beijing 100176, CN

LAN, Yunfeng

Beijing 100176, CN

QIN, Haifeng

Beijing 100176, CN

ZHANG, Wenqiang

Beijing 100176, CN

WANG, Hao

Beijing 100176, CN

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.