MAGNETRON-ZERSTÄUBUNGSVORRICHTUNG
European patent · EP4269649 · In force
Register entry
- Publication number
- EP4269649
- Application number
- EP21909362
- Kind
- European patent with effect for Switzerland and Liechtenstein
- Status
- In force
- Specification
- Granted
- Filed
- Dec 21, 2021
- Published
- Nov 1, 2023
- Granted
- Jan 28, 2026
- Protection ends at the latest
- Dec 20, 2041
- Next annual fee due
- Dec 31, 2026
- IPC classes
- C23C 14/35 (2006.01)C23C 14/02 (2006.01)H01J 37/34 (2006.01)H01J 37/32 (2006.01)
- Priority
- CN 202011530202 22.12.2020
- PCT application
- PCT/CN2021/139913 21.12.2021
- PCT publication
- WO2022/135366 30.06.2022
- Filing language
- Chinese
- Source
- Swissreg
History
What the Federal Institute of Intellectual Property published about this title, newest first.
- Feb 11, 2026
Agent entered
- Representative
- Schmauder & Partner AG, Patent- und Markenanwälte VSP, Zwängiweg 7, 8038 Zürich
Published in Swissreg on 11.02.2026
- Jan 28, 2026
Granted
- Specification status
- Non-published patent application → Granted patent
- Status of protective title
- Initiated → Active
Published in Swissreg on 28.01.2026
Parties
Agent
Inventor
WU, Shubo
Beijing 100176, CN
MA, Yinggong
Beijing 100176, CN
SHI, Shuaitao
Beijing 100176, CN
XU, Wenxue
Beijing 100176, CN
GUO, Bingliang
Beijing 100176, CN
ZHEN, Ziyang
Beijing 100176, CN
ZHANG, Lu
Beijing 100176, CN
CUI, Yaxin
Beijing 100176, CN
ZHAI, Hongtao
Beijing 100176, CN
The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.