EUV-DURCHLÄSSIGE MEMBRAN

European patent · EP4369097 · Deleted

Register entry

Publication number
EP4369097
Application number
EP22865876
Kind
European patent with effect for Switzerland and Liechtenstein
Status
Deleted
Specification
Granted
Filed
Sep 15, 2022
Published
May 15, 2024
Granted
Jun 18, 2025
Deleted
Apr 25, 2026
Reason
Annual fee unpaid
IPC classes
G03F 1/62 (2012.01)
PCT application
PCT/JP2022/034591 15.09.2022
PCT publication
WO2024/057499 21.03.2024
Filing language
Japanese
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. Apr 30, 2026

    Change

    Published in Swissreg on 30.04.2026

  2. Apr 25, 2026

    Deleted, fee unpaid

    Status of protective title
    Active → Cancelled
    Cancellation date
    25.04.2026
    Cause for cancellation
    Non-payment of renewal fee

    Published in Swissreg on 25.04.2026

  3. Jun 18, 2025

    Granted

    Specification status
    Non-published patent application → Granted patent
    Status of protective title
    Initiated → Active

    Published in Swissreg on 18.06.2025

Parties

Inventor

KASHIWAYA, Toshikatsu

Nagoya-City, Aichi 467-8530, JP

GORIKI, Naoki

Nagoya-City, Aichi 467-8530, JP

TANGE, Shoji

Nagoya-City, Aichi 467-8530, JP

KONDO, Atsuo

Nagoya-City, Aichi 467-8530, JP

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.