GEBONDETE WAFERMETROLOGIE

Patent europeic · EP3507826 · Stritgà

Inscripziun en il register

Numer da publicaziun
EP3507826
Numer da la dumonda
EP17876339
Gener
Patent europeic cun effect per la Svizra ed il Liechtenstein
Status
Stritgà
Scrittira da patent
Concedì
Annunzià
27-11-2017
Publitgà
10-07-2019
Concedì
28-05-2025
Stritgà
23-06-2026
Motiv
Taxa annuala betg pajada
Classas IPC
H01L 21/66 (2006.01)
G06T 7/13 (2017.01)
G06T 7/60 (2017.01)
G06T 7/73 (2017.01)
G06T 7/00 (2017.01)
G01B 11/24 (2006.01)
Prioritad
US 201662427373 P 29.11.2016
US 201715627834 20.06.2017
Dumonda PCT
PCT/US2017/063310 27.11.2017
Publicaziun PCT
WO2018/102260 07.06.2018
Lingua da l’annunzia
englais
Funtauna
Swissreg

Istorgia

Quai che l’Institut federal da la proprietad intellectuala ha publitgà davart quest titel, il pli nov l’emprim.

  1. 23-06-2026

    Stritgà, taxa betg pajada

    Status of protective title
    Active → Cancelled
    Cancellation date
    23.06.2026
    Cause for cancellation
    Non-payment of renewal fee

    Published in Swissreg on 23.06.2026

  2. 09-04-2026

    Midada

    Published in Swissreg on 09.04.2026

  3. 28-05-2025

    Concedì

    Specification status
    Non-published patent application → Granted patent
    Status of protective title
    Initiated → Active

    Published in Swissreg on 28.05.2025

Partidas

Possessur

KLA - Tencor Corporation

Kla-Tencor Corporation

Legal Department One Technology Drive, Milpitas, California 95035, US

Inventur

SAH, Kaushik

3010 Kessel Lo, BE

KRAH, Thomas

61169 Friedberg, DE

LI, Shifang

Pleasanton, California 94588, US

EISENBACH, Heiko

65604 Elz, DE

STOERRING, Moritz

B-1030 Brussels, BE

Il register numna mintga partida cun num ed adressa. In possessur u in represchentant vegn collià cun in’organisaziun, sch’exact ina unitad giuridica dal register da commerzi porta ses num; la via d’ina partida betg enconuschida uschia na vegn betg mussada qua.