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Patent europeic · EP3553811 · Stritgà

Inscripziun en il register

Numer da publicaziun
EP3553811
Numer da la dumonda
EP19168714
Gener
Patent europeic cun effect per la Svizra ed il Liechtenstein
Status
Stritgà
Scrittira da patent
Concedì
Annunzià
11-04-2019
Publitgà
16-10-2019
Concedì
09-03-2022
Stritgà
23-11-2022
Motiv
Taxa annuala betg pajada
Classas IPC
H01L 21/311 (2006.01)
G03F 7/42 (2006.01)
Prioritad
US 201862656843 P 12.04.2018
US 201916365506 26.03.2019
Lingua da l’annunzia
englais
Funtauna
Swissreg

Istorgia

Quai che l’Institut federal da la proprietad intellectuala ha publitgà davart quest titel, il pli nov l’emprim.

  1. 18-01-2023

    Midada

    Published in Swissreg on 18.01.2023

  2. 23-11-2022

    Stritgà, taxa betg pajada

    Published in Swissreg on 23.11.2022

  3. 09-03-2022

    Concedì

    Published in Swissreg on 09.03.2022

Partidas

Possessur

Versum Materials US, LLC

8555 S. River Parkway, Tempe, AZ 85284, US

Inventur

Peters, Richard Dalton

Tempe, AZ 85284-2601, US

Cao, Yuanmei

Tempe, AZ 85284-2601, US

Il register numna mintga partida cun num ed adressa. In possessur u in represchentant vegn collià cun in’organisaziun, sch’exact ina unitad giuridica dal register da commerzi porta ses num; la via d’ina partida betg enconuschida uschia na vegn betg mussada qua.