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Patent europeic · EP3963403 · En vigur

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Numer da publicaziun
EP3963403
Numer da la dumonda
EP20714216
Gener
Patent europeic cun effect per la Svizra ed il Liechtenstein
Status
En vigur
Scrittira da patent
Concedì
Annunzià
27-03-2020
Publitgà
09-03-2022
Concedì
01-07-2026
La protecziun finescha il pli tard
26-03-2040
Proxima taxa annuala scadenta
31-03-2027
Classas IPC
G03F 7/00 (2006.01)
Prioritad
EP 19172109 01.05.2019
Dumonda PCT
PCT/EP2020/058871 27.03.2020
Publicaziun PCT
WO2020/221529 05.11.2020
Lingua da l’annunzia
englais
Funtauna
Swissreg

Istorgia

Quai che l’Institut federal da la proprietad intellectuala ha publitgà davart quest titel, il pli nov l’emprim.

  1. 01-07-2026

    Concedì

    Specification status
    Non-published patent application → Granted patent
    Status of protective title
    Initiated → Active

    Published in Swissreg on 01.07.2026

Partidas

Possessur

ASML Netherlands B.V.

P.O. Box 324, 5500 AH Veldhoven, NL

Inventur

FRENCKEN, Mark, Johannes, Hermanus

5500 AH Veldhoven, NL

NAGTEGAAL, Theodorus, Marcus

5500 AH Veldhoven, NL

VOZNYI, Oleg, Viacheslavovich

5500 AH Veldhoven, NL

Il register numna mintga partida cun num ed adressa. In possessur u in represchentant vegn collià cun in’organisaziun, sch’exact ina unitad giuridica dal register da commerzi porta ses num; la via d’ina partida betg enconuschida uschia na vegn betg mussada qua.