ENDEFFECTOR EINES WAFERHANDLINGSYSTEMS SOWIE WAFERHANDLINGSYSTEM

European patent · EP3093879 · Deleted

Register entry

Publication number
EP3093879
Application number
EP15167537
Kind
European patent with effect for Switzerland and Liechtenstein
Status
Deleted
Specification
Granted
Filed
May 13, 2015
Published
Nov 16, 2016
Granted
Jul 7, 2021
Deleted
Dec 23, 2022
Reason
Annual fee unpaid
IPC classes
H01L 21/68 (2006.01)
H01L 21/687 (2006.01)
Filing language
German
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. Dec 23, 2022

    Deleted, fee unpaid

    Published in Swissreg on 23.12.2022

  2. May 18, 2022

    Change

    Published in Swissreg on 18.05.2022

  3. Jul 7, 2021

    Granted

    Published in Swissreg on 07.07.2021

Parties

Holder

Integrated Dynamics Engineering GmbH

Hermannstraße 9-13, 65479 Raunheim, DE

Inventor

Birkner, Andreas

07743 Jena, DE

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.