LITHOGRAFISCHES VERFAHREN

European patent · EP3627228 · In force

Register entry

Publication number
EP3627228
Application number
EP19206439
Kind
European patent with effect for Switzerland and Liechtenstein
Status
In force
Specification
Granted
Filed
Sep 4, 2018
Published
Mar 25, 2020
Granted
Jan 14, 2026
Protection ends at the latest
Sep 3, 2038
Next annual fee due
Sep 30, 2026
IPC classes
G03F 9/00 (2006.01)
G03F 7/00 (2006.01)
Priority
EP 17193637 28.09.2017
EP 18164511 28.03.2018
EP 18166720 11.04.2018
Divided from
EP18768811
Filing language
English
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. Jan 14, 2026

    Granted

    Specification status
    Non-published patent application → Granted patent
    Status of protective title
    Initiated → Active

    Published in Swissreg on 14.01.2026

Parties

Holder

ASML Netherlands B.V.

P.O. Box 324, 5500 AH Veldhoven, NL

Inventor

BIJNEN, Franciscus Godefridus Casper

5500 AH Veldhoven, NL

BRINKHOF, Ralph

5500 AH Veldhoven, NL

CEKLI, Hakki, Ergun

5500 AH Veldhoven, NL

COX, Matthijs

5500 AH Veldhoven, NL

ERDAMAR, Ahmet Koray

5500 AH Veldhoven, NL

GOOSEN, Maikel Robert

5500 AH Veldhoven, NL

HULSEBOS, Edo Maria

5500 AH Veldhoven, NL

KOU, Weitian

5500 AH Veldhoven, NL

MEGENS, Henricus Johannes Lambertus

5500 AH Veldhoven, NL

RIJPSTRA, Manouk

5500 AH Veldhoven, NL

ROELOFS, Willem Seine Christian

5500 AH Veldhoven, NL

TINNEMANS, Patricius Aloysius Jacobus

5500 AH Veldhoven, NL

VAN DE VEN, Wendy Johanna Martina

5500 AH Veldhoven, NL

VAN T WESTEINDE, Maaike

5500 AH Veldhoven, NL

VERHEES, Loek Johannes Petrus

5500 AH Veldhoven, NL

VU, Tran Thanh Thuy

5500 AH Veldhoven, NL

YAGUBIZADE, Hadi

5500 AH Veldhoven, NL

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.