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European patent · EP3646372 · In force

Register entry

Publication number
EP3646372
Application number
EP18848116
Kind
European patent with effect for Switzerland and Liechtenstein
Status
In force
Specification
Granted
Filed
Aug 23, 2018
Published
May 6, 2020
Granted
Oct 1, 2025
Protection ends at the latest
Aug 22, 2038
Next annual fee due
Aug 31, 2026
IPC classes
H01L 21/66 (2006.01)
G03F 7/20 (2006.01)
G06T 7/00 (2017.01)
G01N 21/88 (2006.01)
G01N 21/958 (2006.01)
Priority
US 201762549775 P 24.08.2017
US 201715803091 03.11.2017
PCT application
PCT/US2018/047620 23.08.2018
PCT publication
WO2019/040679 28.02.2019
Filing language
English
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. Aug 12, 2026

    Change

    Published in Swissreg on 12.08.2026

  2. Oct 1, 2025

    Granted

    Specification status
    Non-published patent application → Granted patent
    Status of protective title
    Initiated → Active

    Published in Swissreg on 01.10.2025

Parties

Holder

KLA - Tencor Corporation

Kla-Tencor Corporation

Legal Department One Technology Drive, Milpitas, California 95035, US

Inventor

JIANG, Xuguang

Sunnyvale, California 94087, US

ZHANG, Yong

Cupertino, California 95014, US

DING, Yiwu

Danville, California 94526, US

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.