SCHÄTZUNG VON ASYMMETRISCHEN ABERRATIONEN

European patent · EP3853665 · Deleted

Register entry

Publication number
EP3853665
Application number
EP18938833
Kind
European patent with effect for Switzerland and Liechtenstein
Status
Deleted
Specification
Granted
Filed
Oct 30, 2018
Published
Jul 28, 2021
Granted
Dec 20, 2023
Deleted
May 23, 2025
Reason
Annual fee unpaid
IPC classes
G03F 7/20 (2006.01)
H01L 21/66 (2006.01)
PCT application
PCT/US2018/058068 30.10.2018
PCT publication
WO2020/091733 07.05.2020
Filing language
English
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. May 23, 2025

    Deleted, fee unpaid

    Status of protective title
    Active → Cancelled
    Cancellation date
    23.05.2025
    Cause for cancellation
    Non-payment of renewal fee

    Published in Swissreg on 23.05.2025

  2. Oct 30, 2024

    Change

    Published in Swissreg on 30.10.2024

  3. Dec 20, 2023

    Granted

    Published in Swissreg on 20.12.2023

Parties

Holder

KLA - Tencor Corporation

Kla-Tencor Corporation

Legal Department One Technology Drive, Milpitas, California 95035, US

Inventor

LEVINSKI, Vladimir

23100 Migdal HaEmek, IL

FELER, Yoel

32163 Haifa, IL

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.