SUBSTRAT UNTERSTÜTZUNG UND SUBSTRATTISCH

European patent · EP4111261 · In force

Register entry

Publication number
EP4111261
Application number
EP21701136
Kind
European patent with effect for Switzerland and Liechtenstein
Status
In force
Specification
Granted
Filed
Jan 25, 2021
Published
Jan 4, 2023
Granted
Apr 23, 2025
Protection ends at the latest
Jan 24, 2041
Next annual fee due
Jan 31, 2027
IPC classes
G03F 7/20 (2006.01)
Priority
EP 20158919 24.02.2020
EP 20163571 17.03.2020
PCT application
PCT/EP2021/051581 25.01.2021
PCT publication
WO2021/170320 02.09.2021
Filing language
English
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. Mar 4, 2026

    Change

    Published in Swissreg on 04.03.2026

  2. Feb 1, 2026

    Change

    Published in Swissreg on 01.02.2026

  3. Apr 23, 2025

    Granted

    Specification status
    Non-published patent application → Granted patent
    Status of protective title
    Initiated → Active

    Published in Swissreg on 23.04.2025

Parties

Holder

ASML Netherlands B.V.

P.O. Box 324, 5500 AH Veldhoven, NL

Inventor

BALTIS, Coen, Hubertus, Matheus

5500 AH Veldhoven, NL

TEN KATE, Nicolaas

5500 AH Veldhoven, NL

VERMEULEN, Marcus, Martinus, Petrus, Adrianus

5500 AH Veldhoven, NL

TROMP, Siegfried, Alexander

5500 AH Veldhoven, NL

VAN DEN BERKMORTEL, Frank, Pieter, Albert

5500 AH Veldhoven, NL

ROSET, Niek, Jacobus, Johannes

5500 AH Veldhoven, NL

KRAMER, Gijs

5500 AH Veldhoven, NL

BRANTJES, Nicolaas, Petrus, Marcus

5500 AH Veldhoven, NL

FONTEYN, Michiel, Theodorus, Jacobus

5500 AH Veldhoven, NL

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.