GEBONDETE WAFERMETROLOGIE

European patent · EP3507826 · Deleted

Register entry

Publication number
EP3507826
Application number
EP17876339
Kind
European patent with effect for Switzerland and Liechtenstein
Status
Deleted
Specification
Granted
Filed
Nov 27, 2017
Published
Jul 10, 2019
Granted
May 28, 2025
Deleted
Jun 23, 2026
Reason
Annual fee unpaid
IPC classes
H01L 21/66 (2006.01)
G06T 7/13 (2017.01)
G06T 7/60 (2017.01)
G06T 7/73 (2017.01)
G06T 7/00 (2017.01)
G01B 11/24 (2006.01)
Priority
US 201662427373 P 29.11.2016
US 201715627834 20.06.2017
PCT application
PCT/US2017/063310 27.11.2017
PCT publication
WO2018/102260 07.06.2018
Filing language
English
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. Jun 23, 2026

    Deleted, fee unpaid

    Status of protective title
    Active → Cancelled
    Cancellation date
    23.06.2026
    Cause for cancellation
    Non-payment of renewal fee

    Published in Swissreg on 23.06.2026

  2. Apr 9, 2026

    Change

    Published in Swissreg on 09.04.2026

  3. May 28, 2025

    Granted

    Specification status
    Non-published patent application → Granted patent
    Status of protective title
    Initiated → Active

    Published in Swissreg on 28.05.2025

Parties

Holder

KLA - Tencor Corporation

Kla-Tencor Corporation

Legal Department One Technology Drive, Milpitas, California 95035, US

Inventor

SAH, Kaushik

3010 Kessel Lo, BE

KRAH, Thomas

61169 Friedberg, DE

LI, Shifang

Pleasanton, California 94588, US

EISENBACH, Heiko

65604 Elz, DE

STOERRING, Moritz

B-1030 Brussels, BE

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.