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European patent · EP3548971 · Deleted

Register entry

Publication number
EP3548971
Application number
EP18745244
Kind
European patent with effect for Switzerland and Liechtenstein
Status
Deleted
Specification
Granted
Filed
Jan 24, 2018
Published
Oct 9, 2019
Granted
Dec 22, 2021
Deleted
Aug 24, 2022
Reason
Annual fee unpaid
IPC classes
G03F 7/20 (2006.01)
H01L 21/027 (2006.01)
Priority
US 201762450454 P 25.01.2017
US 201815867485 10.01.2018
PCT application
PCT/US2018/015104 24.01.2018
PCT publication
WO2018/140534 02.08.2018
Filing language
English
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. Nov 2, 2022

    Change

    Published in Swissreg on 02.11.2022

  2. Aug 24, 2022

    Deleted, fee unpaid

    Published in Swissreg on 24.08.2022

  3. Dec 22, 2021

    Granted

    Published in Swissreg on 22.12.2021

Parties

Holder

KLA - Tencor Corporation

Kla-Tencor Corporation

Legal Department One Technology Drive, Milpitas, California 95035, US

Inventor

ADEL, Michael A.

30900 Ya'akov Zichron, IL

CHOI, Dongsub

Hwasung City Gyeonggi Province, KR

PIERSON, William

Austin, Texas 78730, US

YERUSHALMI, Liran

30900 Zicron Yaacob, IL

ALUMOT, Dror

7647001 Rehovot, IL

SUBRAHMANYAN, Pradeep

Cupertino, California 95014, US

HEO, Hoyoung

Gwangju-si Gyeonggi-do 31250, KR

MANASSEN, Amnon

34892 Haifa, IL

LEVY, Ady

San Jose, California 95125, US

ROBINSON, John

Austin, Texas 78731, US

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.