PHOTOLACKENTFERNER

European patent · EP3553811 · Deleted

Register entry

Publication number
EP3553811
Application number
EP19168714
Kind
European patent with effect for Switzerland and Liechtenstein
Status
Deleted
Specification
Granted
Filed
Apr 11, 2019
Published
Oct 16, 2019
Granted
Mar 9, 2022
Deleted
Nov 23, 2022
Reason
Annual fee unpaid
IPC classes
H01L 21/311 (2006.01)
G03F 7/42 (2006.01)
Priority
US 201862656843 P 12.04.2018
US 201916365506 26.03.2019
Filing language
English
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. Jan 18, 2023

    Change

    Published in Swissreg on 18.01.2023

  2. Nov 23, 2022

    Deleted, fee unpaid

    Published in Swissreg on 23.11.2022

  3. Mar 9, 2022

    Granted

    Published in Swissreg on 09.03.2022

Parties

Holder

Versum Materials US, LLC

8555 S. River Parkway, Tempe, AZ 85284, US

Inventor

Peters, Richard Dalton

Tempe, AZ 85284-2601, US

Cao, Yuanmei

Tempe, AZ 85284-2601, US

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.