OBJEKTPOSITIONIERER UND LITHOGRAFISCHES GERÄT
European patent · EP3963403 · In force
Register entry
- Publication number
- EP3963403
- Application number
- EP20714216
- Kind
- European patent with effect for Switzerland and Liechtenstein
- Status
- In force
- Specification
- Granted
- Filed
- Mar 27, 2020
- Published
- Mar 9, 2022
- Granted
- Jul 1, 2026
- Protection ends at the latest
- Mar 26, 2040
- Next annual fee due
- Mar 31, 2027
- IPC classes
- G03F 7/00 (2006.01)
- Priority
- EP 19172109 01.05.2019
- PCT application
- PCT/EP2020/058871 27.03.2020
- PCT publication
- WO2020/221529 05.11.2020
- Filing language
- English
- Source
- Swissreg
History
What the Federal Institute of Intellectual Property published about this title, newest first.
- Jul 1, 2026
Granted
- Specification status
- Non-published patent application → Granted patent
- Status of protective title
- Initiated → Active
Published in Swissreg on 01.07.2026
Parties
Inventor
FRENCKEN, Mark, Johannes, Hermanus
5500 AH Veldhoven, NL
NAGTEGAAL, Theodorus, Marcus
5500 AH Veldhoven, NL
VOZNYI, Oleg, Viacheslavovich
5500 AH Veldhoven, NL
The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.