EUV-BELICHTUNGSGERÄT
Patent europeic · EP3674798 · En vigur
Inscripziun en il register
- Numer da publicaziun
- EP3674798
- Numer da la dumonda
- EP20151898
- Gener
- Patent europeic cun effect per la Svizra ed il Liechtenstein
- Status
- En vigur
- Scrittira da patent
- Concedì
- Annunzià
- 28-07-2011
- Publitgà
- 01-07-2020
- Concedì
- 03-09-2025
- La protecziun finescha il pli tard
- 27-07-2031
- Proxima taxa annuala scadenta
- 31-07-2026
- Classas IPC
- G03F 7/20 (2006.01)G21K 1/06 (2006.01)G02B 5/08 (2006.01)G02B 7/18 (2021.01)B82Y 10/00 (2011.01)G02B 17/06 (2006.01)G02B 27/00 (2006.01)
- Prioritad
- US 36914210 P 30.07.2010
- Derivà da
- EP11740883
- Lingua da l’annunzia
- englais
- Funtauna
- Swissreg
Istorgia
Quai che l’Institut federal da la proprietad intellectuala ha publitgà davart quest titel, il pli nov l’emprim.
- 15-07-2026
Midada
Published in Swissreg on 15.07.2026
- 03-09-2025
Concedì
- Specification status
- Non-published patent application → Granted patent
- Status of protective title
- Initiated → Active
Published in Swissreg on 03.09.2025
Partidas
Possessur
Inventur
BAER, Norman
73430 Aalen, DE
LOERING, Ulrich
89073 Ulm, DE
NATT, Oliver
90451 Nürnberg, DE
WITTICH, Gero
73431 Aalen, DE
LAUFER, Timo
70180 Stuttgart, DE
KUERZ, Peter
73434 Aalen, DE
LIMBACH, Guido
73434 Aalen, DE
HEMBACHER, Stefan
86399 Bobingen, DE
WALTER, Holger
73453 Abtsgmünd, DE
KWAN, Yim-Bun-Patrick
73447 Oberkochen, DE
HAUF, Markus
89075 Ulm, DE
STICKEL, Franz-Josef
73434 Aalen-Unterrombach, DE
VAN SCHOOT, Jan
5504 Veldhoven, NL
Il register numna mintga partida cun num ed adressa. In possessur u in represchentant vegn collià cun in’organisaziun, sch’exact ina unitad giuridica dal register da commerzi porta ses num; la via d’ina partida betg enconuschida uschia na vegn betg mussada qua.