EUV-BELICHTUNGSGERÄT
European patent · EP3674798 · In force
Register entry
- Publication number
- EP3674798
- Application number
- EP20151898
- Kind
- European patent with effect for Switzerland and Liechtenstein
- Status
- In force
- Specification
- Granted
- Filed
- Jul 28, 2011
- Published
- Jul 1, 2020
- Granted
- Sep 3, 2025
- Protection ends at the latest
- Jul 27, 2031
- Next annual fee due
- Jul 31, 2026
- IPC classes
- G03F 7/20 (2006.01)G21K 1/06 (2006.01)G02B 5/08 (2006.01)G02B 7/18 (2021.01)B82Y 10/00 (2011.01)G02B 17/06 (2006.01)G02B 27/00 (2006.01)
- Priority
- US 36914210 P 30.07.2010
- Divided from
- EP11740883
- Filing language
- English
- Source
- Swissreg
History
What the Federal Institute of Intellectual Property published about this title, newest first.
- Jul 15, 2026
Change
Published in Swissreg on 15.07.2026
- Sep 3, 2025
Granted
- Specification status
- Non-published patent application → Granted patent
- Status of protective title
- Initiated → Active
Published in Swissreg on 03.09.2025
Parties
Holder
Inventor
BAER, Norman
73430 Aalen, DE
LOERING, Ulrich
89073 Ulm, DE
NATT, Oliver
90451 Nürnberg, DE
WITTICH, Gero
73431 Aalen, DE
LAUFER, Timo
70180 Stuttgart, DE
KUERZ, Peter
73434 Aalen, DE
LIMBACH, Guido
73434 Aalen, DE
HEMBACHER, Stefan
86399 Bobingen, DE
WALTER, Holger
73453 Abtsgmünd, DE
KWAN, Yim-Bun-Patrick
73447 Oberkochen, DE
HAUF, Markus
89075 Ulm, DE
STICKEL, Franz-Josef
73434 Aalen-Unterrombach, DE
VAN SCHOOT, Jan
5504 Veldhoven, NL
The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.