ELEKTROSTATISCHES FUTTER

European patent · EP3852135 · Deleted

Register entry

Publication number
EP3852135
Application number
EP19859818
Kind
European patent with effect for Switzerland and Liechtenstein
Status
Deleted
Specification
Granted
Filed
Aug 27, 2019
Published
Jul 21, 2021
Granted
Jun 21, 2023
Deleted
Mar 23, 2024
Reason
Annual fee unpaid
IPC classes
H01L 21/683 (2006.01)
H01L 21/67 (2006.01)
H01L 23/32 (2006.01)
Priority
CN 201811073364 14.09.2018
PCT application
PCT/CN2019/102828 27.08.2019
PCT publication
WO2020/052432 19.03.2020
Filing language
Chinese
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. May 1, 2024

    Change

    Published in Swissreg on 01.05.2024

  2. Mar 23, 2024

    Deleted, fee unpaid

    Published in Swissreg on 23.03.2024

  3. Jun 21, 2023

    Granted

    Published in Swissreg on 21.06.2023

Parties

Holder

Beijing NAURA Microelectronics Equipment Co., Ltd.

No. 8 Wenchang Avenue Beijing Economic-Technological Development Area, Beijing 100176, CN

Inventor

LIU, Pengliang

Beijing 100176, CN

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.